Title:
SECONDARY ELECTRON MULTIPLIER, ION DETECTION DEVICE, AND ION DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/125671
Kind Code:
A1
Abstract:
Provided are a secondary electron multiplier, an ion detection device, and an ion detection method which enable a reduction in the influence of stray light remaining in an Off-Axis structure for reducing the influence of the stray light and an improvement in S/N ratio. In a secondary electron multiplier (11), ions (13) are injected from the lateral side of an electron generation plane (100) of an electrode (D1) that is an initial stage electrode of the secondary electron multiplier (11).
Inventors:
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
Application Number:
PCT/JP2009/058467
Publication Date:
November 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
NAKAMURA MEGUMI (JP)
SHIOKAWA YOSHIRO (JP)
PENG QIANG (JP)
International Classes:
H01J49/06; H01J43/04; H01J43/10; H01J43/18; H01J43/22; H01J49/42
Foreign References:
| JPH02183960A | 1990-07-18 |
Attorney, Agent or Firm:
OKABE Masao et al. (JP)
Okabe Masao (JP)
Okabe Masao (JP)
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