Title:
SEMICONDUCTOR DEVICE FOR DETECTING RADIATION
Document Type and Number:
WIPO Patent Application WO/2015/004867
Kind Code:
A1
Abstract:
The provision of heat-conducting sections comprising films of an electrically insulating, highly heat-dissipating material that provides a sufficient heat-dissipation effect, specifically diamond-like carbon films, results in a heat-dissipation structure with a high heat-dissipation efficiency, reducing temperature increases and yielding a high degree of reliability. In this semiconductor device (20) for detecting radiation, a radiation-detecting element (5) is formed on a first semiconductor layer (3); a read-out MOS transistor for a read-out circuit (8), i.e. a peripheral circuit element, is formed on a second semiconductor layer (4) and the periphery thereof; and a wiring structure connected to the read-out circuit element is formed on top of same. Said semiconductor device (20) for detecting radiation is provided with heat-conducting sections (11) consisting of heat-dissipating films of an electrically insulating, highly heat-dissipating material. Said heat-conducting sections (11) extend upwards from and are connected via heat-dissipation paths or signal transmission paths that are part of a separate system from signal transmission paths connected to the first semiconductor layer (3), the radiation-detecting element (5), the second semiconductor layer (4), the read-out circuit element of the read-out circuit (8), i.e. the peripheral circuit element, and/or the wiring structure (metal wiring (9) and contact electrodes (6, 10)).
Inventors:
MASUDA RYOHICHI (JP)
Application Number:
PCT/JP2014/003355
Publication Date:
January 15, 2015
Filing Date:
June 23, 2014
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L27/144; H01L21/3205; H01L21/336; H01L21/768; H01L23/52; H01L23/522; H01L27/12; H01L27/146; H01L29/786; H01L31/10; H01L31/107
Foreign References:
| JP2006173351A | 2006-06-29 | |||
| JP2002314061A | 2002-10-25 | |||
| JPH01147861A | 1989-06-09 | |||
| JP2004349537A | 2004-12-09 | |||
| JP2004072017A | 2004-03-04 |
Attorney, Agent or Firm:
YAMAMOTO, Shusaku et al. (JP)
Shusaku Yamamoto (JP)
Shusaku Yamamoto (JP)
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