Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2010/113384
Kind Code:
A1
Abstract:
A semiconductor device is provided with a conversion body (110) for converting sound pressure into an electrical signal, and an amplification element (140A) which has an amplification circuit for amplifying the electrical signal converted by the conversion body (110). The conversion body (110) has a pedestal (112) formed with a cavity section (113) from the top surface to the bottom surface, and a vibrating film (111) which is arranged to plug the opening on the top surface of the cavity section (113) and converts the sound pressure into an electrical signal by vibrating in response to the sound pressure. The amplification element (140A) is arranged below the conversion body (110) to plug the cavity section (113).
More Like This:
| JP6406666 | Condenser microphone unit |
Inventors:
UTSUMI MASAKI
FUJII KYOKO
NAKANO TAKAHIRO
FUJII KYOKO
NAKANO TAKAHIRO
Application Number:
PCT/JP2010/001024
Publication Date:
October 07, 2010
Filing Date:
February 18, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
UTSUMI MASAKI
FUJII KYOKO
NAKANO TAKAHIRO
UTSUMI MASAKI
FUJII KYOKO
NAKANO TAKAHIRO
International Classes:
H04R19/04; H01L29/84; H04R31/00
Domestic Patent References:
| WO2005086535A1 | 2005-09-15 | |||
| WO2006011383A1 | 2006-02-02 |
Foreign References:
| JP2007180201A | 2007-07-12 | |||
| JP2007263677A | 2007-10-11 | |||
| JP2006211468A | 2006-08-10 | |||
| JPH11266499A | 1999-09-28 | |||
| JP2008199353A | 2008-08-28 | |||
| JPH1188992A | 1999-03-30 |
Attorney, Agent or Firm:
NII, Hiromori (JP)
New house extensive 守 (JP)
New house extensive 守 (JP)
Download PDF:
Previous Patent: SEMICONDUCTOR DEVICE
Next Patent: INFORMATION REPRODUCING DEVICE AND INFORMATION REPRODUCING METHOD
Next Patent: INFORMATION REPRODUCING DEVICE AND INFORMATION REPRODUCING METHOD