Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/103597
Kind Code:
A1
Abstract:
Each of a plurality of wiring layers (L1-L5) has insulating films (103-106), and a first electrode (101) and a second electrode (102) which are embedded in the insulating films such that the electrodes are spaced apart from each other but facing each other. The first electrode (101) in one wiring layer and the second electrode (102) in other wiring layer provided above or below the wiring layer are disposed to face each other. The width of the first electrode (101) in the wiring layer and that of the second electrode (102) in other wiring layer are different from each other.
Inventors:
ISHII KATSUJI
NISHIURA SHINJI
NISHIURA SHINJI
Application Number:
PCT/JP2009/006979
Publication Date:
September 16, 2010
Filing Date:
December 17, 2009
Export Citation:
Assignee:
PANASONIC CORP (JP)
ISHII KATSUJI
NISHIURA SHINJI
ISHII KATSUJI
NISHIURA SHINJI
International Classes:
H01L21/822; H01L21/3205; H01L21/82; H01L23/52; H01L27/04
Foreign References:
| JP2005183739A | 2005-07-07 | |||
| JP2001189420A | 2001-07-10 | |||
| JPH11501159A | 1999-01-26 |
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (JP)
Hiroshi Maeda (JP)
Hiroshi Maeda (JP)
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