SENSOR APPARATUS - KYOCERA CORP

Title:

SENSOR APPARATUS

Document Type and Number:

WIPO Patent Application WO/2015/115419

Kind Code:

A1

Abstract:

　The sensor apparatus according to one aspect of the present invention is provided with: an element substrate; an element electrode positioned on the upper surface of the element substrate; an insulating member covering at least a portion of the element electrode; and a detector having an immobilizing film positioned on the upper surface of the element substrate or on the upper surface of the insulating member, and used for detecting a detection target included in a test specimen. The surface roughness of the immobilizing film is lower than the surface roughness of the element electrode. In the sensor apparatus according to another aspect of the present invention, the amount of oxygen in the surface layer portion of the immobilizing film is less than the amount of oxygen in the surface layer portion of the element electrode.

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Inventors:

KOBAYASHI KYOHEI (JP)
KISHIDA YUJI (JP)

Application Number:

PCT/JP2015/052175

Publication Date:

August 06, 2015

Filing Date:

January 27, 2015

Export Citation:

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Assignee:

KYOCERA CORP (JP)

International Classes:

G01N29/02; G01N5/02

Domestic Patent References:

WO2013147217A1	2013-10-03
WO2010146923A1	2010-12-23

Foreign References:

JP2561753B2	1996-12-11
JP2003248001A	2003-09-05
JP2007139510A	2007-06-07
JPH05240762A	1993-09-17
JPH05240762A	1993-09-17

Other References: