Title:
SILANE RECOVERY DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2023/243972
Kind Code:
A1
Abstract:
The present invention relates to a silane recovery device and method and, more specifically, is to provide a silane recovery device and method, which enable the recovery and recycling of silane by efficiently removing impurities such as hydrogen, nitrogen, etc., from silane gas, which is an unreacted by-product generated from processes using silane as a raw material in the fields of silane manufacturing facilities or semiconductors, displays, batteries, etc.
Inventors:
LEE DEOK HO (KR)
LEE SOON PYO (KR)
SEONG BOHYUN (KR)
CHOI GEUN (KR)
LEE SOON PYO (KR)
SEONG BOHYUN (KR)
CHOI GEUN (KR)
Application Number:
PCT/KR2023/008068
Publication Date:
December 21, 2023
Filing Date:
June 12, 2023
Export Citation:
Assignee:
SK INC (KR)
International Classes:
C01B33/04; F25J3/02
Foreign References:
| US20140007615A1 | 2014-01-09 | |||
| CN215335810U | 2021-12-28 | |||
| CN110850901A | 2020-02-28 | |||
| CN101905887A | 2010-12-08 | |||
| JP2000044576A | 2000-02-15 | |||
| US20140000310A1 | 2014-01-02 |
Attorney, Agent or Firm:
JI, Sang Hyup (KR)
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