Title:
SILICA GLASS CRUCIBLE
Document Type and Number:
WIPO Patent Application WO/2022/024666
Kind Code:
A1
Abstract:
The present invention is a silica glass crucible for growing a monocrystalline silicon ingot by the CZ method. The silica glass crucible has a bottomed cylindrical shape comprising a cylindrical straight body portion, a first curved portion continuous with the lower end of the straight body portion and having a first curvature R1, a second curved portion continuous with the first curved portion and having a second curvature R2, and a bottom portion continuous with the second curved portion. The first curvature R1 and the second curvature R2 satisfy the relationship R1 < R2. The outer surface of the bottom portion constitutes a flat surface orthogonal to the center axis of the silica glass crucible, or a recessed surface that is recessed from the flat surface. Thus, it is possible to provide a bottomed cylindrical silica glass crucible for growing a monocrystalline silicon ingot by the CZ method, the silica glass crucible being capable of self-standing stably when placed inside a bottomed cylindrical graphite crucible.
Inventors:
TOMOKUNI KAZUKI (JP)
IKEDA YOSHINORI (JP)
IKEDA YOSHINORI (JP)
Application Number:
PCT/JP2021/025116
Publication Date:
February 03, 2022
Filing Date:
July 02, 2021
Export Citation:
Assignee:
SHIN ETSU QUARTZ PROD CO LTD (JP)
International Classes:
C30B15/12; C30B29/06
Foreign References:
| JP2007186354A | 2007-07-26 | |||
| JP2005206448A | 2005-08-04 | |||
| JP2007269533A | 2007-10-18 | |||
| JP2013139359A | 2013-07-18 | |||
| JPH1025185A | 1998-01-27 | |||
| JPH11217290A | 1999-08-10 | |||
| JPH1087306A | 1998-04-07 | |||
| JP2003020234A | 2003-01-24 | |||
| JP2012017245A | 2012-01-26 | |||
| JP2013139356A | 2013-07-18 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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