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Title:
SLIP RING, SUPPORT MECHANISM, AND PLASMA PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/170989
Kind Code:
A1
Abstract:
A slip ring according to an embodiment is provided with: a conductive rotor capable of rotation about a rotating axis; a conductive stator disposed coaxially with the rotor; a conductive sphere disposed between the rotor and the stator and forming an electric path between the rotor and the stator; and a conductive coil spring which is disposed between the sphere and the rotor or the stator, and which extends in a circumferential direction with respect to the rotating axis and is in contact with the sphere and the rotor or the stator.

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Inventors:
MATSUMOTO KAZUYA (JP)
YAMAMOTO TAKASHI (JP)
Application Number:
PCT/JP2016/061338
Publication Date:
October 27, 2016
Filing Date:
April 07, 2016
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/3065; H01L21/683; H05H1/46
Domestic Patent References:
WO2009128134A12009-10-22
Foreign References:
JPH11214108A1999-08-06
JPH0229161U1990-02-26
JPS59132111U1984-09-04
JPH0547432A1993-02-26
JP2010165472A2010-07-29
JP2010147003A2010-07-01
JPH01117317A1989-05-10
JPH09186141A1997-07-15
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
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