Title:
SOFT X-RAY GENERATION APPARATUS HAVING IMPROVED ANTI-STATIC RANGE AND HEAT-DISSIPATION FUNCTION
Document Type and Number:
WIPO Patent Application WO/2016/017847
Kind Code:
A1
Abstract:
The present invention relates to a soft x-ray generation apparatus having an improved anti-static range and a heat-dissipation function. The soft x-ray generation apparatus according to the present invention comprises: a filament for emitting electrons; a collimation part for collimating the electrons emitted from the filament; a beryllium window wherein an x-ray generating material is coated on one surface thereof such that if the collimated electrons collide, x-rays are emitted through another surface thereof; a supporting part made of a metal material for providing support around the beryllium window; and a valve made of a metal material for radiating heat that is generated in the beryllium window and transferred through the supporting part, wherein the supporting part is coupled to a front surface thereof.
Inventors:
PARK RAY JUN (KR)
LEE SANG SUK (KR)
PARK TAE YOUNG (KR)
LEE SANG SUK (KR)
PARK TAE YOUNG (KR)
Application Number:
PCT/KR2014/007434
Publication Date:
February 04, 2016
Filing Date:
August 11, 2014
Export Citation:
Assignee:
XL CO LTD (KR)
International Classes:
H01J35/02; H05F3/04
Foreign References:
| KR20110120204A | 2011-11-03 | |||
| KR20110028422A | 2011-03-18 | |||
| JPH06314548A | 1994-11-08 | |||
| JP2009164038A | 2009-07-23 | |||
| JP2013142557A | 2013-07-22 |
Attorney, Agent or Firm:
LEE, UN CHEOL (KR)
이은철 (KR)
이은철 (KR)
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