Title:
SOLAR CELL MANUFACTURING METHOD AND SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2014/155444
Kind Code:
A1
Abstract:
The present invention provides: a method for manufacturing a solar cell capable of achieving a high conversion efficiency even if a buffer layer is formed by means of a sputtering method, i.e., a dry process; and the solar cell. According to one embodiment of the present invention, in a solar cell manufacturing method, a ZnMgO film (4) as a buffer layer is formed on a Se-containing light absorbing layer (3) by means of a sputtering method. A film-forming step of the ZnMgO film (4) has: a first step (S03) for forming the ZnMgO film directly above the light absorbing layer (3) by means of the sputtering method, while introducing oxygen gas; and a second step (S04) for forming the ZnMgO film by means of the sputtering method by stopping the oxygen gas introduction.
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Inventors:
SATO MASANORI (JP)
WATABE OSAMU (JP)
NAKAGAWA TAKASHI (JP)
NIKI SHIGERU (JP)
SHIBATA HAJIME (JP)
WATABE OSAMU (JP)
NAKAGAWA TAKASHI (JP)
NIKI SHIGERU (JP)
SHIBATA HAJIME (JP)
Application Number:
PCT/JP2013/006507
Publication Date:
October 02, 2014
Filing Date:
November 05, 2013
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
H01L31/18; H01L21/363; H01L31/0749
Foreign References:
| JP2003264306A | 2003-09-19 | |||
| JP2004158619A | 2004-06-03 | |||
| JPS61279181A | 1986-12-09 | |||
| JP2009021607A | 2009-01-29 | |||
| US5078804A | 1992-01-07 | |||
| US20110108099A1 | 2011-05-12 |
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
Okabe 讓 (JP)
Okabe 讓 (JP)
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