Title:
SOLID-STATE IMAGING DEVICE AND SOLID-STATE IMAGING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/171789
Kind Code:
A1
Abstract:
According to the present invention, in a configuration in which a translucent member is provided on a solid-state imaging element with a support part therebetween and a cavity is provided between the solid-state imaging element and the translucent member, an interface between layers which constitute a layer structure of the solid-state imaging element is prevented from being peeled off even when stress caused by an increase in pressure inside the cavity is generated. The present invention is provided with: a solid-state imaging element having one substrate surface side of a semiconductor substrate as a light receiving side; translucent members provided on the light receiving side of the solid-state imaging element such that the translucent members are spaced apart at a predetermined interval; and a support part which forms a cavity between the solid-state imaging element and the translucent members. The solid-state imaging element has, as a layer structure provided on the light receiving side of the semiconductor substrate, a layer structure comprising: a first layer; a second layer formed of a material different from the first layer; and a third layer formed, in the second layer, of a material different from the first layer. The third layer has a protruding and recessed part in which the interface with the second layer has a protruding and recessed shape in an area section in which at least a support part is formed in a planar direction along the substrate surface of the semiconductor substrate.
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Inventors:
KAWAZOE TAKANOBU (JP)
Application Number:
PCT/JP2019/001625
Publication Date:
September 12, 2019
Filing Date:
January 21, 2019
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/146; H04N5/369
Foreign References:
| JP2004055674A | 2004-02-19 | |||
| JP2016058699A | 2016-04-21 | |||
| JP2008185744A | 2008-08-14 | |||
| JP2007150708A | 2007-06-14 |
Attorney, Agent or Firm:
MATSUO Kenichiro (JP)
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