Title:
SPONGE BRUSH REPLACEMENT TOOL AND INSTALLATION METHOD, AND SEMICONDUCTOR CHEMICAL-MECHANICAL POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/016963
Kind Code:
A1
Abstract:
A replacement tool (11) for use on a sponge brush (10) in a semiconductor chemical-mechanical polishing device, an installation method, and a semiconductor chemical-mechanical polishing device. The replacement tool (11) comprises a first horizontal beam (110), a connecting mechanism (114, 115), a second horizontal beam (111), a first hook (112), and a second hook (113); the first horizontal beam (110) connects with the second horizontal beam (111) via the connecting mechanism (114, 115); the first hook (112) is fixedly connected to the first horizontal beam (110), and a portion of the first hook (112) hooks into a recessed end (103) of the sponge brush (10); the second hook (113) is fixedly connected to the second horizontal beam (111), and a portion of the second hook (113) is sleeved onto a protruding end (102) of the sponge brush (10); the first horizontal beam (110) and the second horizontal beam (111) move relative to each other, such that the first hook (112) and the second hook (113) respectively fit with or separate from the recessed end (103) or the protruding end (102) of the sponge brush (10). The present solution greatly decreases contamination of the sponge brush (10) during the replacement process, the replacement tool (11) is easy to use, and an operator can use the replacement tool (11) to replace the sponge brush (10) after receiving simple training.
Inventors:
DANG JINWEI (CN)
KU CHIN-CHUNG (CN)
HAN LINGFENG (CN)
KU CHIN-CHUNG (CN)
HAN LINGFENG (CN)
Application Number:
PCT/CN2021/093136
Publication Date:
January 27, 2022
Filing Date:
May 11, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L21/304; B25B27/00; B65G7/12; B66C1/28; H01L21/67
Foreign References:
| CN204727433U | 2015-10-28 | |||
| CN104853999A | 2015-08-19 | |||
| CN1355929A | 2002-06-26 | |||
| CN209275421U | 2019-08-20 | |||
| CN206243892U | 2017-06-13 | |||
| JPH11255261A | 1999-09-21 |
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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