Title:
STAGE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/145855
Kind Code:
A1
Abstract:
[Problem] To provide a stage apparatus with a structure where a mechanism of ɵ direction movement is added without inviting a rising of a center of gravity, so that it is possible to adjust the posture in the θ direction and to perform position control of the stage with high accuracy. [Solution] A stage 1 is loaded on an X direction slider 23 that is guided by an X direction guide 21 provided to extend over a pair of Y direction sliders 33, 34 guided by a pair of Y direction guides 31, 32 that extend in parallel in the Y direction, the stage 1 being movable in the XY directions. One Y direction slider 31 is connected to the X direction guide 21 via a hinge 81. The pair of Y direction sliders 31, 32, by moving in the mutually opposite directions in the Y direction, allows the integral θ direction movement of the X direction guide 21, X direction slider 23, and the stage 1. The other Y direction guide 32 is a flat guide and the other Y direction slider 34 is displaceable in the X direction.
Inventors:
NOMOTO KENTARO (JP)
Application Number:
PCT/JP2017/005237
Publication Date:
August 31, 2017
Filing Date:
February 14, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; G05D3/00; G05D3/12; H01L21/68
Foreign References:
| JP2003316440A | 2003-11-07 | |||
| JP2012118601A | 2012-06-21 | |||
| JP2002025902A | 2002-01-25 | |||
| JP2006226719A | 2006-08-31 | |||
| JP2014060447A | 2014-04-03 |
Attorney, Agent or Firm:
HOTATE Koichi (JP)
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