Title:
STORAGE SHELF
Document Type and Number:
WIPO Patent Application WO/2021/176865
Kind Code:
A1
Abstract:
A storage shelf (1) provided with: a main body frame (10); a plurality of shelf modules (40) which each have a base plate (41) removably provided to the main body frame (10) and a supply nozzle (51) attached to the base plate (41); a main pipe (61) through which flows a purge gas supplied from a supply source; and a first branching parts (62) which are provided to the main pipe (61) and which branch a flow channel from the main pipe (61), wherein each shelf module (40) is provided with a flow control device (55) which adjusts the flow of the purge gas supplied from the supply nozzle (51), each first branching part (62) is connected to a respective module pipe (63) via an open/close valve (64) that opens/closes the flow channel, and each flow control device (55) is connected to a respective module pipe (63).
Inventors:
TSUBAKI TATSUO (JP)
Application Number:
PCT/JP2021/001632
Publication Date:
September 10, 2021
Filing Date:
January 19, 2021
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
B65G1/14; H01L21/673
Domestic Patent References:
| WO2015166710A1 | 2015-11-05 | |||
| WO2020017137A1 | 2020-01-23 |
Foreign References:
| JP2015533026A | 2015-11-16 | |||
| JP2019108220A | 2019-07-04 | |||
| JP2015533026A | 2015-11-16 |
Other References:
See also references of EP 4112506A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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