Title:
STORAGE SYSTEM AND WAFER
Document Type and Number:
WIPO Patent Application WO/2021/095469
Kind Code:
A1
Abstract:
The present invention curbs degradation in communication reliability between a probe electrode and a pad electrode. A storage system of one embodiment is provided with: a wafer comprising a memory chip unit that includes a pad electrode having a first portion and a second portion that are electrically connected to one another, and comprising a memory cell array electrically connected to the pad electrode; and a prober that is capable of holding the wafer and that reads/writes to/from the memory cell array. The prober comprises: a probe card having a probe electrode allowing for contact with the pad electrode, and having a memory controller capable of writing/reading to/from the memory cell array via the probe electrode; and a movement mechanism for causing the probe card or the held wafer to move, in order to bring the pad electrode of the held wafer and the probe electrode into contact. The movement mechanism is capable of executing: a first operation for bringing the probe electrode into contact with the first portion of the pad electrode without coming into contact with the second portion; and a second operation for bringing the probe electrode into contact with the second portion of the pad electrode without coming into contact with the first portion.
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Inventors:
YOSHIMIZU YASUHITO (JP)
FUKUSHIMA TAKASHI (JP)
HITOMI TATSURO (JP)
INOUE ARATA (JP)
MIURA MASAYUKI (JP)
KANNO SHINICHI (JP)
FUJISAWA TOSHIO (JP)
NAKATSUKA KEISUKE (JP)
SANUKI TOMOYA (JP)
FUKUSHIMA TAKASHI (JP)
HITOMI TATSURO (JP)
INOUE ARATA (JP)
MIURA MASAYUKI (JP)
KANNO SHINICHI (JP)
FUJISAWA TOSHIO (JP)
NAKATSUKA KEISUKE (JP)
SANUKI TOMOYA (JP)
Application Number:
PCT/JP2020/039590
Publication Date:
May 20, 2021
Filing Date:
October 21, 2020
Export Citation:
Assignee:
KIOXIA CORP (JP)
International Classes:
G06F12/00; G01R31/28; H01L21/66
Foreign References:
| JPH05291368A | 1993-11-05 | |||
| US20140375349A1 | 2014-12-25 | |||
| US20190227116A1 | 2019-07-25 | |||
| JP2015028982A | 2015-02-12 | |||
| US20170179027A1 | 2017-06-22 | |||
| US20190164910A1 | 2019-05-30 | |||
| US20080175080A1 | 2008-07-24 | |||
| US20140181376A1 | 2014-06-26 |
Other References:
See also references of EP 4002128A4
Attorney, Agent or Firm:
KURATA, Masatoshi et al. (JP)
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