Title:
SUBSTRATE-CONVEYING ROBOT SYSTEM, AND METHOD FOR CORRECTING POSITION OF SUBSTRATE PLACEMENT AND/OR POSITION OF SUBSTRATE REMOVAL BY SUBSTRATE-CONVEYING ROBOT
Document Type and Number:
WIPO Patent Application WO/2024/075839
Kind Code:
A1
Abstract:
In this substrate-conveying robot system (100), a control unit (13) acquires a center position (20a) of a target member (20) in a horizontal plane on the basis of: a first tangent (TL1) corresponding to an outer circumferential edge section (20b) of the target member (20), the first tangent (TL1) being acquired by using a detection unit (14) and causing a hand (12) to approach the target member (20) from a first direction in the horizontal plane; and a second tangent (TL2) corresponding to the outer circumferential edge section (20b) of the target member (20), the second tangent (TL2) being acquired by using the detection unit (14) and causing the hand (12) to approach the target member (20) from a second direction in the horizontal plane, the second direction differing from the first direction.
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Inventors:
SHIBATA TAKESHI
HASHIZAKI SATOSHI
HASHIZAKI SATOSHI
Application Number:
PCT/JP2023/036553
Publication Date:
April 11, 2024
Filing Date:
October 06, 2023
Export Citation:
Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J13/08
Attorney, Agent or Firm:
MIYAZONO Hirokazu (JP)
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