Title:
EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JPH0689840
Kind Code:
A
Abstract:
PURPOSE: To prevent deterioration of exposure accuracy which is caused by expansion and contraction of a substrate because of change of substrate temperature with time inside an exposure device.
CONSTITUTION: This device is provided with a timer 6 which measures the time after a cassette 4 with a substrate is put is transferred inside a thermostatic chamber 1 and a control part 7 which transfers the substrate from the cassette 4 to an exposure position 2 after a specified time lapsed which is measured by the timer 6. A temperature sensor for measuring a temperature of a substrate is provided instead of the timer 6.
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Inventors:
KATSUME TOSHIHIRO
HARA NORIHIKO
HARA NORIHIKO
Application Number:
JP24045592A
Publication Date:
March 29, 1994
Filing Date:
September 09, 1992
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/30; G03F7/20; H01L21/027; H01L21/677; (IPC1-7): H01L21/027; H01L21/68
Next Patent: EXPOSURE AND ALIGNER