Title:
SUBSTRATE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/105031
Kind Code:
A1
Abstract:
A substrate detection device (1) is provided with: a light projection unit (4) which is arranged so as to face an inlet (31) and an outlet (31) each corresponding to a specific position on a conveyance path (3), and which projects detection light (Ld) toward the specific position; a light reception unit (5) which is arranged so as to face the specific position and which receives the detection light and obtains a light reception amount (R); a time zone recognition unit (23) that recognizes an absence time zone (Tn) which is a part of an operative time zone and during which a substrate (K) cannot exist at the specific position and recognizes a determination time zone (Tj) obtained by excluding the absence time zone from the operative time zone; a setting unit (24) that sets a threshold light amount (S) for determination of whether or not the substrate exists at the specific position, on the basis of the light reception amount obtained during the absence time zone; and a determination unit (53) that determines whether or not the substrate exists at the specific position, by comparing the light reception amount obtained during the determination time zone with the threshold light amount.
Inventors:
NGUYEN HIEU NGHIA (JP)
HARA AKIRA (JP)
ITO TARO (JP)
HARA AKIRA (JP)
ITO TARO (JP)
Application Number:
PCT/JP2016/086148
Publication Date:
June 14, 2018
Filing Date:
December 06, 2016
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
G01V8/12; H01L21/67
Domestic Patent References:
| WO2016103371A1 | 2016-06-30 |
Foreign References:
| JP2008218021A | 2008-09-18 | |||
| JP2001324574A | 2001-11-22 | |||
| JPH0389192A | 1991-04-15 |
Attorney, Agent or Firm:
KOBAYASHI Osamu et al. (JP)
Download PDF: