Title:
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD OF SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/035965
Kind Code:
A1
Abstract:
A group management device that this substrate processing system is provided with has: a communication unit that receives monitoring data from a substrate processing device; a storage unit that readably stores the monitoring data; a representative value data generating unit that, when a predetermined event is detected, generates representative value data on the basis of the monitoring data conforming to data extraction conditions, and stores the representative value data together with timestamp data in the storage unit; and a representative value data manipulation unit that manipulates the representative value data and displays the result on a display unit.
Inventors:
SHIMIZU HIDETO (JP)
Application Number:
PCT/JP2011/069451
Publication Date:
March 22, 2012
Filing Date:
August 29, 2011
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC (JP)
SHIMIZU HIDETO (JP)
SHIMIZU HIDETO (JP)
International Classes:
H01L21/02; G05B19/418
Domestic Patent References:
| WO2008146736A1 | 2008-12-04 | |||
| WO2008096792A1 | 2008-08-14 |
Attorney, Agent or Firm:
YUI Tohru et al. (JP)
Oil well 透 (JP)
Oil well 透 (JP)
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Claims: