Title:
SUBSTRATE STORAGE CONTAINER
Document Type and Number:
WIPO Patent Application WO/2020/184353
Kind Code:
A1
Abstract:
A substrate storage container 1 transports or stores substrates to be used in a semiconductor production step, and is provided with at least one structural component (for example, a viewing window 11d) that uses a material obtained by mixing (a) 99.99-99.95 wt% of a thermoplastic resin and (b) 0.01-0.05 wt% of single-walled carbon nanotubes. With this configuration, the substrate storage container 1 can be provided with a structural component having transparency and satisfying the level of conductivity required in a semiconductor production process, even if a material obtained by adding carbon to a transparent thermoplastic resin such as a polycarbonate is used.
Inventors:
MASUKO HIDEHIRO (JP)
Application Number:
PCT/JP2020/009290
Publication Date:
September 17, 2020
Filing Date:
March 05, 2020
Export Citation:
Assignee:
MASUKO HIDEHIRO (JP)
International Classes:
H01L21/673
Foreign References:
| US20140264999A1 | 2014-09-18 | |||
| JP2003341783A | 2003-12-03 | |||
| JP2007332271A | 2007-12-27 | |||
| JP2010199354A | 2010-09-09 | |||
| JP2008532855A | 2008-08-21 |
Attorney, Agent or Firm:
MINOWADA Noboru (JP)
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