Title:
SUBSTRATE SUPPORT MEMBER, SUBSTRATE CONVEYANCE APPARATUS, SUBSTRATE CONVEYANCE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/074474
Kind Code:
A1
Abstract:
A substrate support member is provided with a placement section (20) on which a substrate (P) is placed, and also with support sections (20b) which are provided to the placement section (20) and support a part of the substrate (P) placed on the placement section (20). Among the support sections (20b), a support section (20b) of a first portion and a support section (20b) of a second portion have different heights, relative to the placement section (20), which correspond to the amount of the deflection of the placement section (20) in a state in which the substrate (P) is placed on the placement section (20).
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Inventors:
KATO MASAKI (JP)
TOGUCHI MANABU (JP)
TOGUCHI MANABU (JP)
Application Number:
PCT/JP2010/072135
Publication Date:
June 23, 2011
Filing Date:
December 09, 2010
Export Citation:
Assignee:
NIKON CORP (JP)
KATO MASAKI (JP)
TOGUCHI MANABU (JP)
KATO MASAKI (JP)
TOGUCHI MANABU (JP)
International Classes:
H01L21/673; B65G49/06; G03F7/20; H01L21/027; H01L21/677
Foreign References:
| JPH1064982A | 1998-03-06 | |||
| JP2004273702A | 2004-09-30 | |||
| JP2007114570A | 2007-05-10 | |||
| JP2008081269A | 2008-04-10 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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