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Title:
SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/069545
Kind Code:
A1
Abstract:
This substrate transport device comprises a substrate gripping hand, a holding member (4) provided on the substrate gripping hand and having a nail part (41) for holding a substrate (9) and a support column part for supporting the nail part (41), wherein the support column part bends upon application of a force onto the nail part (41) in such a manner as to reduce the force being applied onto the nail part (41).

Inventors:
FUKUSHIMA TAKAYUKI
Application Number:
PCT/JP2018/028496
Publication Date:
April 11, 2019
Filing Date:
July 30, 2018
Export Citation:
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Assignee:
KAWASAKI HEAVY IND LTD (JP)
International Classes:
H01L21/677; B25J15/08
Foreign References:
JP2001210707A2001-08-03
JP2016072458A2016-05-09
JP2015126045A2015-07-06
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (JP)
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