Title:
SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/122133
Kind Code:
A1
Abstract:
Provided is a substrate transport device that has a compact configuration and achieves high substrate processing throughput. This substrate transport device comprises a substrate transport module and an air transport robot that is provided inside the substrate transport module and has a robot base part that can travel on the substrate transport module. The substrate transport device also comprises a substrate aligner that is provided to an upper part of the robot base part and has at least two substrate mounting stands that perform substrate alignment.
Inventors:
HIRAKIDA JYUNICHI (JP)
Application Number:
PCT/JP2019/048527
Publication Date:
June 18, 2020
Filing Date:
December 11, 2019
Export Citation:
Assignee:
HIRATA SPINNING (JP)
International Classes:
B25J5/02; H01L21/677
Foreign References:
| JP2010541200A | 2010-12-24 | |||
| JPH0927536A | 1997-01-28 | |||
| JP2017535974A | 2017-11-30 | |||
| KR20120124187A | 2012-11-13 | |||
| JP2009021504A | 2009-01-29 | |||
| JP2000058625A | 2000-02-25 |
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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