Title:
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT METHOD, AND SUBSTRATE TREATMENT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2024/048121
Kind Code:
A1
Abstract:
In this invention, an outer flow adjustment member adjusts flow of a gas passing between an upper sealing member and a lower sealing member and causes the gas to flow downward along an outer surface of the lower sealing member. Thus, a so-called air curtain is formed so as to surround a treatment space. Moreover, when the formation of an atmosphere separation space is eliminated, an inner flow adjustment member for adjusting flow of a gas passing through the inside of the lower sealing member and causing the gas to flow in the treatment space raises and lowers integrally with the lower sealing member while the outer flow adjustment member is attached to the upper sealing member and remains at a fixed position. This generates a pressure difference between outlet sides of the outer flow adjustment member and the inner flow adjustment member and increases the flow rate of a gas flowing downward from the outer flow adjustment member along the outer surface of the lower sealing member. That is, the air curtain is strengthened.
Inventors:
NEMOTO SHUHEI (JP)
Application Number:
PCT/JP2023/026932
Publication Date:
March 07, 2024
Filing Date:
July 24, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; H01L21/02
Foreign References:
| JP2015170773A | 2015-09-28 | |||
| JP2009158565A | 2009-07-16 | |||
| JP2009158564A | 2009-07-16 | |||
| JP2015230921A | 2015-12-21 | |||
| JP2002184738A | 2002-06-28 |
Attorney, Agent or Firm:
FURIKADO, Shoichi et al. (JP)
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