Title:
SUPER-FLEXIBLE TRANSPARENT SEMICONDUCTOR THIN FILM AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/189523
Kind Code:
A1
Abstract:
A super-flexible transparent semiconductor thin film and a preparation method therefor. The method comprises: providing an epitaxial substrate (1); growing a sacrificial layer (2) on the epitaxial substrate (1); growing at least one Al 1-nGanN epitaxial layer (11) on the sacrificial layer (2) in a stacking manner, wherein 0
Inventors:
ZHAO YUKUN (CN)
LU SHULONG (CN)
XING ZHIWEI (CN)
ZHANG JIANYA (CN)
LU SHULONG (CN)
XING ZHIWEI (CN)
ZHANG JIANYA (CN)
Application Number:
PCT/CN2020/083148
Publication Date:
September 30, 2021
Filing Date:
April 03, 2020
Export Citation:
Assignee:
SUZHOU INST NANO TECH & NANO BIONICS SINANO CAS (CN)
International Classes:
H01L33/32; H01L33/06
Foreign References:
CN109980054A | 2019-07-05 | |||
CN110061112A | 2019-07-26 | |||
CN105103310A | 2015-11-25 | |||
CN106803478A | 2017-06-06 | |||
CN108010995A | 2018-05-08 | |||
US20090068780A1 | 2009-03-12 |
Attorney, Agent or Firm:
MING & YUE INTELLECTUAL PROPERTY LAW FIRM (CN)
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