Title:
SUPER-SMOOTH SKELETON HAVING BURIED ELECTRODES AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/000224
Kind Code:
A1
Abstract:
A super-smooth skeleton having buried electrodes and a production method therefor, the method comprising the steps of: providing a thin film (2), preparing a plurality of micro-recesses (21) on the thin film, the surface of the thin film being an atomically flat surface; providing electrodes (3) in the micro-recesses to form buried electrodes; and placing a super-smooth sheet (4) above the micro-recesses, when being in contact with a second surface of the thin film, the super-smooth sheet covering at least one micro-recess. Deposition of the electrodes inside the micro-recesses can prevent affecting the surface flatness by the electrodes projecting from the thin film, realize the decoupling of the buried electrodes from the super-smooth atomically flat surface in the thickness direction, thereby solving the problem that the surface flatness of the upper thin film is affected by the difference in the height of the buried electrodes, and achieving the construction of the super-smooth skeleton having buried electrodes in a global scope. Moreover, the technological process is simple, and the batch production of structural super-smooth pairs can be achieved.
More Like This:
Inventors:
XU LUPING (CN)
LI CHUANG (CN)
XIANG XIAOJIAN (CN)
ZHENG QUANSHUI (CN)
LI CHUANG (CN)
XIANG XIAOJIAN (CN)
ZHENG QUANSHUI (CN)
Application Number:
PCT/CN2021/107695
Publication Date:
January 26, 2023
Filing Date:
July 21, 2021
Export Citation:
Assignee:
UNIV TSINGHUA RES INST SHENZHEN (CN)
UNIV TSINGHUA (CN)
UNIV TSINGHUA (CN)
International Classes:
H01L21/48; B82Y40/00; H01L23/498
Foreign References:
| CN111755338A | 2020-10-09 | |||
| CN112645280A | 2021-04-13 | |||
| CN212752231U | 2021-03-19 | |||
| CN103984204A | 2014-08-13 | |||
| US20180294745A1 | 2018-10-11 |
Attorney, Agent or Firm:
SHENZHEN HUIBANG INTELLECTUAL PROPERTY AGENCY FIRM (CN)
Download PDF: