Title:
SURFACE DEFECT INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/126596
Kind Code:
A1
Abstract:
A surface defect inspection device has a swing mechanism (46) for holding an object (40) having a flat surface section, an illumination section (50) for generating illumination light (6b) for illuminating the object (40), a collimating lens (92) for irradiating the object (40) with the light (6b) as light advancing in substantially parallel to at least one axis direction, a mirror (93) for returning reflection light (7) coming from the object (40) to the reflection position on the object (40), an imaging section for imaging re-reflected light (8) that is the reflection light (7) returned to the reflection position on the object (40) and re-reflected there.
Inventors:
TANAKA TOSHIHIKO (JP)
Application Number:
PCT/JP2006/310369
Publication Date:
November 30, 2006
Filing Date:
May 24, 2006
Export Citation:
Assignee:
OLYMPUS CORP (JP)
TANAKA TOSHIHIKO (JP)
TANAKA TOSHIHIKO (JP)
International Classes:
G01N21/88; G01N21/84
Foreign References:
| JPH04105009A | 1992-04-07 | |||
| JPH06258245A | 1994-09-16 | |||
| JPH07306150A | 1995-11-21 | |||
| JPH0712523A | 1995-01-17 | |||
| JP3090152U | 2002-11-29 | |||
| JPH10148577A | 1998-06-02 | |||
| JPS61256241A | 1986-11-13 | |||
| JPH11258174A | 1999-09-24 |
Attorney, Agent or Firm:
Tanai, Sumio (Yaesu Chuo-k, Tokyo 53, JP)
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