Title:
SURFACE SHAPE MEASUREMENT DEVICE AND SURFACE SHAPE MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/182095
Kind Code:
A1
Abstract:
The present invention provides a surface shape measurement device and a surface shape measurement method which make it possible to reduce errors caused by the effects of vibrations that occur during measurement. This surface shape measurement device for measuring the surface shape of an object to be measured comprises: a first imaging system that captures images of the object to be measured at prescribed imaging intervals while scanning relative to a perpendicular direction with respect to the object to be measured; a second imaging system that is separate from the first imaging system and that images, in synchronization with the first imaging system, the object to be measured or an object supporting the object to be measured; a computation unit that calculates the surface shape of the object to be measured on the basis of a plurality of first captured images captured by the first imaging system; a storage unit that stores coordinate system conversion information for converting a second coordinate system of the second imaging system to a first coordinate system of the first imaging system; a displacement detection unit that, on the basis of a plurality of second captured images captured by the second imaging system, detects displacement of the object to be measured during imaging by the first imaging system; and a correction unit that, on the basis of the coordinate system conversion information and the displacement detection result by the displacement detection unit, corrects the surface shape calculated by the computation unit.
Inventors:
HAYASHI KYOHEI (JP)
Application Number:
PCT/JP2023/010045
Publication Date:
September 28, 2023
Filing Date:
March 15, 2023
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
G01B11/24
Domestic Patent References:
| WO2013084557A1 | 2013-06-13 |
Foreign References:
| US20180172429A1 | 2018-06-21 | |||
| JP2015102423A | 2015-06-04 | |||
| JP2013181828A | 2013-09-12 | |||
| JP2010096551A | 2010-04-30 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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