Title:
SYSTEM FOR MANUFACTURING SEMICONDUCTOR PRODUCTS
Document Type and Number:
WIPO Patent Application WO2000068975
Kind Code:
A3
Abstract:
The invention relates to a system for manufacturing semiconductor products in at least one clean room (1). A gantry crane system is provided as a transport system for conveying the semiconductor products to the manufacturing units (2). Said gantry crane system has at least one transport container (8), which is guided above the manufacturing units (2) and can be lowered down to said manufacturing units (2).
Inventors:
HUBER RONALD (US)
KLAEBSCH ROLF-ARNO (DE)
KLAEBSCH ROLF-ARNO (DE)
Application Number:
PCT/DE2000/001453
Publication Date:
April 05, 2001
Filing Date:
May 05, 2000
Export Citation:
Assignee:
INFINEON TECHNOLOGIES AG (DE)
HUBER RONALD (US)
KLAEBSCH ROLF ARNO (DE)
HUBER RONALD (US)
KLAEBSCH ROLF ARNO (DE)
International Classes:
B65G49/00; B65G49/07; B66C13/00; B66C13/48; B66C17/04; H01L21/02; H01L21/677; (IPC1-7): H01L21/00
Domestic Patent References:
| WO1998046503A1 | 1998-10-22 | |||
| WO1999002436A1 | 1999-01-21 | |||
| WO1999017356A1 | 1999-04-08 | |||
| WO2000037338A1 | 2000-06-29 |
Foreign References:
| EP0848413A2 | 1998-06-17 |
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