Title:
SYSTEM AND METHOD FOR PRECISE POSITIONING OF MICROCOMPONENTS
Document Type and Number:
WIPO Patent Application WO2003016206
Kind Code:
A3
Abstract:
A system and method are disclosed that enable precise positioning of microcomponents. According to one embodiment, a system and method for positioning a microcomponent are disclosed, wherein a microcomponent is received into a microcomponent positioning device. A target position for the microcomponent may then be determined, and at least a portion of the microcomponent positioning device is controllably deformed to accurately fix, at least temporarily, the position of the microcomponent at the target position. In one embodiment, microactuators that are operable to move the microcomponent at the target position. In one embodiment, microactuators that are operable to move the microcomponent are controllably deformed to fix the position of the microcomponent at the target position. In another embodiment, support beams that support a microcomponent holder are controllably deformed to fix the position of the microcomponent at the target position.
Inventors:
ELLIS MATTHEW D
SKIDMORE GEORGE D
SKIDMORE GEORGE D
Application Number:
PCT/US2002/025820
Publication Date:
February 19, 2004
Filing Date:
August 15, 2002
Export Citation:
Assignee:
ZYVEX CORP (US)
International Classes:
B81B3/00; B81B7/00; B81C3/00; (IPC1-7): B81C3/00; B81B3/00; B81B7/00; G02B6/42
Domestic Patent References:
| WO2000041021A1 | 2000-07-13 | |||
| WO2001037023A2 | 2001-05-25 |
Foreign References:
| US5602955A | 1997-02-11 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 23 10 February 2001 (2001-02-10)
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