Title:
SYSTEM FOR TREATING WAFERS
Document Type and Number:
WIPO Patent Application WO2000068973
Kind Code:
A3
Abstract:
The invention relates to a system for treating wafers in at least one clean room (3). The inventive system comprises an arrangement of production units (1) and measuring units (2) which are connected to wafers via a transport system for transporting cassettes. Several functionally allocated production units (1) and/or measuring units (2) are combined to form a manufacturing cell (4) which is provided with a loading and unloading station (7) for receiving and forwarding cassettes with wafers. Individual wafers can be supplied to the production units (1) and/or measuring units (2) within the manufacturing cell (4) in order to be treated.
Inventors:
GOETZKE MICHAEL (DE)
Application Number:
PCT/DE2000/001451
Publication Date:
March 15, 2001
Filing Date:
May 05, 2000
Export Citation:
Assignee:
INFINEON TECHNOLOGIES AG (DE)
GOETZKE MICHAEL (DE)
GOETZKE MICHAEL (DE)
International Classes:
B65G49/07; H01L21/00; H01L21/677; (IPC1-7): H01L21/00
Foreign References:
| US5164905A | 1992-11-17 | |||
| US5536128A | 1996-07-16 | |||
| EP0359525A2 | 1990-03-21 | |||
| US5202716A | 1993-04-13 |
Other References:
See also references of EP 1177573A2
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