Title:
TABLE DEVICE AND CARRIER DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/001690
Kind Code:
A1
Abstract:
A table device (100) is provided with: a first member (1) which is movable within a predetermined surface; a second member (2) which is relatively movable with respect to the first member; a first guiding device (4) for which at least a portion is disposed on the first member, and which guides the second member so that the second member moves in a direction parallel to a first axis which is orthogonal to the predetermined surface by way of movement of the first member; a table (10) supported by the second member; a third member (3) connected to at least a portion of the table; bearing members (5) which have a first supply opening capable of supplying gas to between the third member and the bearing members, and which form gas bearings between the third member and the bearing members by way of the gas supplied from the first supply opening so as to support the third member so as to be movable in a direction parallel to the first axis; a parallel pin (20) which is disposed so as to be parallel to the first axis, and which couples the second member and the table; and a supporting device (19) which supports the table. The table is supported by the second member via the supporting device.
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Inventors:
SATOU TOSHINORI (JP)
Application Number:
PCT/JP2013/083978
Publication Date:
January 08, 2015
Filing Date:
December 18, 2013
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
H01L21/68; B23Q1/38; B23Q1/44; B23Q1/62; G12B5/00; H01L21/027
Domestic Patent References:
| WO2006009254A1 | 2006-01-26 | |||
| WO2011138938A1 | 2011-11-10 |
Foreign References:
| JP2010153644A | 2010-07-08 | |||
| JP2004047852A | 2004-02-12 | |||
| JP2001235001A | 2001-08-31 | |||
| JP2009012168A | 2009-01-22 | |||
| JP2004291156A | 2004-10-21 | |||
| JP2011060823A | 2011-03-24 | |||
| JP2009218389A | 2009-09-24 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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