Title:
TABLE DEVICE AND CARRIER DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/001689
Kind Code:
A1
Abstract:
A table device (100) is provided with: a first member (1); a second member (2); a first guiding device (4) which guides the second member so that the second member moves in a direction parallel to a first axis by way of movement of the first member; a table (10) supported by the second member; a first movable member (31) connected to a first section of the table; a second movable member (32) connected to a second section; a first bearing member (5) which supports the first movable member so as to be movable; a second bearing member (5) which supports the second movable member so as to be movable; an actuator (7) which generates force for moving the first member; and a gravity compensation device (60) which includes a first supply unit (621) which supplies gas to a first space faced by a first lower surface of the first movable member, a first adjustment unit (661) which adjusts the amount of gas supplied from the first supply unit, a second supply unit (622) which supplies gas to a second space faced by a second lower surface of the second movable member, and a second adjustment unit (662) which adjusts the amount of gas supplied from the second supply unit, said gravity compensation device being capable of adjusting pressure in the first space and pressure in the second space.
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Inventors:
SATOU TOSHINORI (JP)
Application Number:
PCT/JP2013/083977
Publication Date:
January 08, 2015
Filing Date:
December 18, 2013
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
H01L21/027; F16C29/06; F16C32/06; G03F7/20; H01L21/68
Domestic Patent References:
| WO2008129762A1 | 2008-10-30 | |||
| WO2012032768A1 | 2012-03-15 | |||
| WO2006009254A1 | 2006-01-26 |
Foreign References:
| JP2007049057A | 2007-02-22 | |||
| JP2007134729A | 2007-05-31 | |||
| JP2007311597A | 2007-11-29 | |||
| JP2007513503A | 2007-05-24 | |||
| JP2004195620A | 2004-07-15 | |||
| JP2000056483A | 2000-02-25 | |||
| JP2004047852A | 2004-02-12 | |||
| JP2013217957A | 2013-10-24 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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