TAKE-UP TYPE VACUUM FILMING DEVICE

Title:

TAKE-UP TYPE VACUUM FILMING DEVICE

Document Type and Number:

WIPO Patent Application WO/2008/018297

Kind Code:

A1

Abstract:

Provided is a take-up type vacuum filming device capable of adjusting a pushing force between a printing roller and a backup roller easily and promptly. The pushing force adjustment between the printing roller (33) and the backup roller (21) is performed by moving a mask forming unit (20) including the printing roller (33) and a transfer roller (32) relative to a vacuum chamber (11), thereby to eliminate the individual adjustments of the printing roller (33) and the transfer roller (32), to realize the pushing force adjustment at each unit, to simplify the constitution, to make the work easy and highly precise, and to shorten the working time period.

Inventors:

HAYASHI NOBUHIRO (JP)
FUJII TOMOHARU (JP)
TADA ISAO (JP)
NAKATSUKA ATSUSHI (JP)

Application Number:

PCT/JP2007/064639

Publication Date:

February 14, 2008

Filing Date:

July 26, 2007

Export Citation:

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Assignee:

ULVAC INC (JP)
HAYASHI NOBUHIRO (JP)
FUJII TOMOHARU (JP)
TADA ISAO (JP)
NAKATSUKA ATSUSHI (JP)

International Classes:

C23C14/56; C23C14/04; C23C14/24; H01G13/00

Foreign References:

JPH1081958A	1998-03-31
JPH0466155A	1992-03-02
JPH0366664U	1991-06-28
EP1693481A1	2006-08-23

Other References: