Title:
TAPE AFFIXING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/168392
Kind Code:
A1
Abstract:
[Problem] To provide a tape-affixing device that affixes dicing tape to a workpiece and a dicing frame with appropriate tensile force. [Solution] A tape-affixing device 1 affixes dicing tape DT to a workpiece W and a dicing frame DF along an affixing direction D1. The tape-affixing device 1 comprises: a pressing roller 34 that presses the dicing tape DT to the workpiece W and the dicing frame DF; and a support pin 4 that stretches the dicing tape DT in a width direction D2.
Inventors:
KIZAKI KIYOTAKA (JP)
Application Number:
PCT/JP2021/041651
Publication Date:
August 11, 2022
Filing Date:
November 12, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
H01L21/683; H01L21/301
Domestic Patent References:
| WO2010044324A1 | 2010-04-22 |
Foreign References:
| JPH0251249A | 1990-02-21 | |||
| JP2017041595A | 2017-02-23 | |||
| JPH0311749A | 1991-01-21 | |||
| JPH07211675A | 1995-08-11 | |||
| JP2017110283A | 2017-06-22 |
Attorney, Agent or Firm:
SHIMIZU Takamitsu (JP)
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