Title:
DEVICE AND METHOD FOR DETECTING TENSION ABNORMALITY IN DICING TAPE
Document Type and Number:
WIPO Patent Application WO/2022/168391
Kind Code:
A1
Abstract:
[Problem] To provide a device and method for detecting tension abnormality in dicing tape in which it is possible to accurately detect any tension abnormality in dicing tape by quantitatively evaluating the suitability of dicing tape tension. [Solution] This device for detecting tension abnormality 4 comprises: an air micrometer 41 that, on the basis of the displacement of dicing tape DT when air is blown at a measurement point P of the dicing tape DT at which a workpiece W has not been affixed, measures the tension of the dicing tape DT at the measurement point P; and an evaluation unit (42) for evaluating that the tension of the dicing tape (DT) is appropriate when the tension of the dicing tape (DT) at the measurement point (P) is within a predetermined appropriate range for the tension of the dicing tape (DT), and evaluating that the tension of the dicing tape (DT) is abnormal when the tension of the dicing tape (DT) at the measurement point (P) is not within the appropriate range.
Inventors:
KIZAKI KIYOTAKA (JP)
Application Number:
PCT/JP2021/041646
Publication Date:
August 11, 2022
Filing Date:
November 12, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD (JP)
International Classes:
H01L21/301; H01L21/683
Foreign References:
| JP2020038872A | 2020-03-12 | |||
| JPH05322681A | 1993-12-07 | |||
| JP2007019239A | 2007-01-25 | |||
| JP2019175927A | 2019-10-10 | |||
| JPH05126652A | 1993-05-21 |
Attorney, Agent or Firm:
SHIMIZU Takamitsu (JP)
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