Title:
TCP HANDLING DEVICE AND POSITIONAL DEVIATION CORRECTING METHOD FOR THE SAME
Document Type and Number:
WIPO Patent Application WO/2004/068154
Kind Code:
A1
Abstract:
A TCP handler (2) is provided with a pusher stage (4) capable of moving a carrier tape (5) adsorbed by an adsorption plate (34) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2), and a probe card stage (7) capable of moving a probe card (8) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2). With the TCP handler (2) having such arrangement, it is possible to achieve accurate positioning between the TCP and the probe card (8) to reduce the occurrence of poor contact.
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Inventors:
KANEKO SYUUICHI (JP)
HIGASHIYAMA KENJI (JP)
KANEKO HIROYUKI (JP)
MURANO HISASHI (JP)
HIGASHIYAMA KENJI (JP)
KANEKO HIROYUKI (JP)
MURANO HISASHI (JP)
Application Number:
PCT/JP2003/001033
Publication Date:
August 12, 2004
Filing Date:
January 31, 2003
Export Citation:
Assignee:
JAPAN ENGINEERING CO LTD (JP)
ADVANTEST CORP (JP)
KANEKO SYUUICHI (JP)
HIGASHIYAMA KENJI (JP)
KANEKO HIROYUKI (JP)
MURANO HISASHI (JP)
ADVANTEST CORP (JP)
KANEKO SYUUICHI (JP)
HIGASHIYAMA KENJI (JP)
KANEKO HIROYUKI (JP)
MURANO HISASHI (JP)
International Classes:
G01R31/01; G01R31/28; (IPC1-7): G01R31/26; H01L21/60
Foreign References:
| JPH10185996A | 1998-07-14 | |||
| JPH01282831A | 1989-11-14 |
Attorney, Agent or Firm:
Hayakawa, Yuzi (Suite 501 Hikawa-Annex No.2 9-5, Akasaka 6-chom, Minato-ku Tokyo, JP)
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