Title:
TEMPERATURE CONTROL DEVICE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2023/229163
Kind Code:
A1
Abstract:
This temperature control device for semiconductor manufacturing equipment comprises: a pre-cooling tank for pre-cooling refrigerant gas through a first cryogenic freezer; a cryogenic tank that forms a cryogenic cooling zone through a second cryogenic freezer and maintains liquefied gas, in which the refrigerant gas is liquefied, at a cryogenic temperature in the cryogenic cooling zone; a first pipe for supplying the cryogenic liquefied gas to semiconductor manufacturing equipment; and a second pipe for supplying the liquefied gas recovered from the semiconductor manufacturing equipment to the pre-cooling tank.
Inventors:
YANG WON KYUN (KR)
AHN KYUNG JOON (KR)
AHN KYUNG JOON (KR)
Application Number:
PCT/KR2023/003142
Publication Date:
November 30, 2023
Filing Date:
March 08, 2023
Export Citation:
Assignee:
CRYO H&I INC (KR)
International Classes:
H01L21/67; F25D3/10; F25D17/00; H01L21/683
Foreign References:
| JP2015227775A | 2015-12-17 | |||
| KR20130035755A | 2013-04-09 | |||
| KR101756181B1 | 2017-07-26 | |||
| JPH05136095A | 1993-06-01 | |||
| KR102489501B1 | 2023-01-18 |
Attorney, Agent or Firm:
MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)
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