Title:
TEMPERATURE AND PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/245895
Kind Code:
A1
Abstract:
A temperature and pressure sensor, comprising: a housing, the housing being provided with a fluid inlet (30); a pressure sensitive assembly (1), which is arranged in the housing and comprises a ceramic plate (101) extending horizontally; and a temperature sensitive assembly (2), which is arranged in a lower cavity (01a) and comprises a temperature sensor (23), each of two connection ends (22) of the temperature sensor (23) being electrically connected to a circuit board (104) by means of an elastic connector (21), a conductive pin (110) and a conductor (106) in sequence. The conductive pins (110) respectively pass through two via holes (10d) provided in the ceramic plate (101), the gaps between the conductive pins (110) and the corresponding via holes (10d) being plugged by sealing bodies made of a glass material. The fluid inlet (30) is in communication with the lower cavity (01a). In the temperature and pressure sensor, a pressure core body (103) is arranged on the ceramic plate (101), as a silicon substrate of a silicon piezoresistive pressure sensitive element and the ceramic plate (101) have a relatively equivalent CTE, the temperature and pressure sensor has great durability. In addition, the glass material and ceramic have a relatively equivalent CTE and also have strong chemical affinity and great bonding performance, so that a manufacturing process is simplified and the manufacturing cost is reduced.
Inventors:
WANG XIAOPING (CN)
CAO WAN (CN)
WU LIN (CN)
LIANG SHIHAO (CN)
WU PEIBAO (CN)
WANG HAO (CN)
ZHAO XIUPING (CN)
CAO WAN (CN)
WU LIN (CN)
LIANG SHIHAO (CN)
WU PEIBAO (CN)
WANG HAO (CN)
ZHAO XIUPING (CN)
Application Number:
PCT/CN2022/122015
Publication Date:
December 28, 2023
Filing Date:
September 28, 2022
Export Citation:
Assignee:
WUHAN FINEMEMS INC (CN)
International Classes:
G01L19/00; G01K1/14; G01K13/00; G01L19/14
Foreign References:
| CN112611504A | 2021-04-06 | |||
| CN214010629U | 2021-08-20 | |||
| CN214010588U | 2021-08-20 | |||
| CN207570605U | 2018-07-03 | |||
| CN114526771A | 2022-05-24 | |||
| CN114543889A | 2022-05-27 | |||
| CN113108828A | 2021-07-13 | |||
| CN215677144U | 2022-01-28 | |||
| US20200400477A1 | 2020-12-24 | |||
| GB8328674D0 | 1983-11-30 |
Attorney, Agent or Firm:
CENFO INTELLECTUAL PROPERTY AGENCY (CN)
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