Title:
THERMOSETTING RESIN COMPOSITION, CURED FILM THEREOF, LAYERED PRODUCT, SEMICONDUCTOR DEVICE AND METHODS FOR PRODUCING THESE
Document Type and Number:
WIPO Patent Application WO/2019/013240
Kind Code:
A1
Abstract:
Provided are: a thermosetting resin composition which is excellent in terms of suppressing fluctuations over time in the thickness of a film formed from the thermosetting resin composition and which is excellent in terms of strength upon formation of a cured film; a cured film of the composition; a layered product; a semiconductor device; and methods for producing these. This thermosetting resin composition contains: a polymer precursor selected from between a polyimide precursor and a polybenzoxazole precursor; a salt containing a cation derived from an amine compound and an anion derived from an acidic compound; and a solvent. The pKa value of a conjugate acid of the amine compound and the pKa value of the acidic compound satisfy numerical formula 1. Numerical formula 1: 3.5 ≤ (pKa value of conjugate acid of amine compound + pKa value of the acidic compound) / 2 ≤ 7.1
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Inventors:
YOSHIDA KENTA (JP)
KAWABATA TAKESHI (JP)
IWAI YU (JP)
SHIBUYA AKINORI (JP)
KAWABATA TAKESHI (JP)
IWAI YU (JP)
SHIBUYA AKINORI (JP)
Application Number:
PCT/JP2018/026134
Publication Date:
January 17, 2019
Filing Date:
July 11, 2018
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B32B15/08; C08L79/08; B32B27/00; B32B27/34; C08G73/10; C08K5/09; C08K5/17; C08K5/42; G03F7/004; G03F7/027; G03F7/031; G03F7/20; G03F7/40; H01L23/12
Domestic Patent References:
WO2017104672A1 | 2017-06-22 | |||
WO2006057036A1 | 2006-06-01 |
Foreign References:
JP2004091572A | 2004-03-25 | |||
JP2015108053A | 2015-06-11 | |||
JPH09316200A | 1997-12-09 | |||
JP2003084434A | 2003-03-19 | |||
JP2001264715A | 2001-09-26 | |||
JP2014122279A | 2014-07-03 |
Attorney, Agent or Firm:
SIKS & CO. (JP)
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