THIN FILM CAPACITOR AND ELECTRONIC CIRCUIT BOARD

Title:

THIN FILM CAPACITOR AND ELECTRONIC CIRCUIT BOARD

Document Type and Number:

WIPO Patent Application WO/2020/045446

Kind Code:

A1

Abstract:

[Problem] To provide a thin film capacitor for which electrode conductivity is high and electrode irregularities are unlikely to be generate even if the capacitor if heated up to 700°C. [Solution] This thin film capacitor has a first electrode, a dielectric layer, and a second electrode. The dielectric layer contains an ABO2N-type oxynitride. The nitrogen concentration of the part of the dielectric layer that contacts the first electrode is no more than half the nitrogen concentration of the center part of the dielectric layer.

Inventors:

YAMAZAKI KUMIKO (JP)
SHIBAHARA TAKESHI (JP)
YAMAZAKI JUNICHI (JP)

Application Number:

PCT/JP2019/033544

Publication Date:

March 05, 2020

Filing Date:

August 27, 2019

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Assignee:

TDK CORP (JP)

International Classes:

H01G4/33; C04B35/58; C23C14/08; H01B3/12; H01G4/12; H01L21/316; H01L21/822; H01L27/04

Domestic Patent References:

WO2017135294A1

2017-08-10

Foreign References:

JP2014051740A

2014-03-20

Attorney, Agent or Firm:

MAEDA & SUZUKI (JP)

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