Title:
THREE-DIMENSIONAL SHAPE, DISPLACEMENT, AND STRAIN MEASUREMENT DEVICE AND METHOD USING PERIODIC PATTERN, AND PROGRAM THEREFOR
Document Type and Number:
WIPO Patent Application WO/2018/061321
Kind Code:
A1
Abstract:
In a conventional moire method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moire fringes as a grating for generating phase-shifted second-order moire fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moire fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moire fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.
Inventors:
WANG QINGHUA (JP)
RI SHIEN (JP)
TSUDA HIROSHI (JP)
RI SHIEN (JP)
TSUDA HIROSHI (JP)
Application Number:
PCT/JP2017/020435
Publication Date:
April 05, 2018
Filing Date:
June 01, 2017
Export Citation:
Assignee:
AIST (JP)
International Classes:
G01B11/16; G01B11/25; G01J9/02; G01N21/45
Domestic Patent References:
| WO2015008404A1 | 2015-01-22 |
Foreign References:
| JP2015141151A | 2015-08-03 | |||
| JP2009264852A | 2009-11-12 | |||
| JP2016142726A | 2016-08-08 | |||
| US20150029514A1 | 2015-01-29 |
Other References:
YOSHIHARU MORIMOTO ET AL.: "Displacement and Strain Distribution Measurement by Sampling Moire Method", JOURNAL OF THE VACUUM SOCIETY OF JAPAN, vol. 54, no. l, 11 March 2011 (2011-03-11), pages 32 - 38, XP055365411
See also references of EP 3489621A4
See also references of EP 3489621A4
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