Title:
TIN TRAPPING DEVICE, EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/183550
Kind Code:
A1
Abstract:
The present invention addresses the problem of suppressing reduction in reliability of an EUV light generation device as a result of tin being stuck to the inside of an exhaust pump (60) or tin flowing reverse from a drain tank and adhering to a focusing mirror. A tin trapping device (50) for recovering tin inside a chamber device in which the tin is formed into plasma by means of a laser beam in the internal space thereof is provided with: a casing (55) provide with a gas inlet port (55I) through which an exhaust gas in the chamber device flows in and a gas exhaust port (55E) through which the exhaust gas is discharged; and a main heater (51) that reaches a temperature not lower than the melting point of tin but lower than the boiling point of tin and that is disposed in the casing (55) such that a projection surface, obtained by projecting the main heater in a direction in which the exhaust gas at the gas inlet port (55I) flows, covers the gas inlet port.
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Inventors:
NIIMI GOTA (JP)
UENO YOSHIFUMI (JP)
NAGAI SHINJI (JP)
UENO YOSHIFUMI (JP)
NAGAI SHINJI (JP)
Application Number:
PCT/JP2019/009521
Publication Date:
September 17, 2020
Filing Date:
March 08, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H01J35/00
Domestic Patent References:
| WO2017042915A1 | 2017-03-16 |
Foreign References:
| JP2008277481A | 2008-11-13 | |||
| JP2010212674A | 2010-09-24 | |||
| JP2013004369A | 2013-01-07 | |||
| JP2013506280A | 2013-02-21 | |||
| JP2013131483A | 2013-07-04 | |||
| JP2010171405A | 2010-08-05 | |||
| JP2012146613A | 2012-08-02 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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