Title:
TRANSDUCER AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/134692
Kind Code:
A1
Abstract:
The present invention relates to the field of piezoelectric transducers, and provides a transducer. The transducer comprises a first wafer (100) and a second wafer (200); the first wafer (100) and the second wafer (200) each comprise a substrate (110, 210), a first oxide layer (105, 205) fixed to one side of the substrate (110, 210), a metal layer (114, 214) fixed to the other side of the substrate (110, 210), and a silicon nitride layer (104, 204), a first electrode (103, 203), a piezoelectric layer (102, 202), and a second electrode (101, 201) which are sequentially deposited on the first oxide layer (105, 205); the substrate (110, 210) comprises a first silicon layer (111, 211), a second silicon layer (113, 213), and a second oxide layer (112, 212) sandwiched between the first silicon layer (111, 211) and the second silicon layer (113, 213); the metal layer (114) of the first wafer (100) and the metal layer (214) of the second wafer (200) are fixedly connected; the first wafer (100) is provided with a cavity (122) and gaps (121, 123); and the second wafer (200) is provided with a cavity (222), a first gap (221), and a second gap (223). Moreover, the present invention further provides a manufacturing method for the transducer. Compared with the prior art, by designing the two wafers, SPL is increased by two times, and the structural stability is improved.
Inventors:
GOH KIAN HENG (SG)
DAN QIANG (CN)
GOH WOOI CHEANG (SG)
LAI KAH KEEN (SG)
DAN QIANG (CN)
GOH WOOI CHEANG (SG)
LAI KAH KEEN (SG)
Application Number:
PCT/CN2019/130931
Publication Date:
July 08, 2021
Filing Date:
December 31, 2019
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H01L41/09; B06B1/06; H01L41/25; H01L41/332
Foreign References:
| CN101111100A | 2008-01-23 | |||
| CN101111099A | 2008-01-23 | |||
| CN110040681A | 2019-07-23 | |||
| CN110560350A | 2019-12-13 | |||
| CN109905833A | 2019-06-18 | |||
| CN1332595A | 2002-01-23 | |||
| JP2004274574A | 2004-09-30 | |||
| US20180117631A1 | 2018-05-03 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
Download PDF:
Previous Patent: IMAGE SENSOR AND IMAGING DEVICE PROVIDED WITH SAME
Next Patent: COMMUNICATION METHOD AND APPARATUS
Next Patent: COMMUNICATION METHOD AND APPARATUS