Title:
TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2022/118575
Kind Code:
A1
Abstract:
A transducer (10A) is provided with: a substrate (20) that contains silicon; and a piezoelectric element (30) that is disposed on the substrate (20). The substrate (20) has: a film body (21) having a first surface (21a) and a second surface (21b) that face one another from opposite directions in a thickness direction; and a frame body (22) that surrounds the film body (21) when viewing the film body (21) from the thickness direction. The piezoelectric element (30) is disposed on the first surface (21a) of the film body (21). A portion of an outer edge (21c) of the film body (21) when viewed from the thickness direction forms a connected part (21d) that is connected to the frame body (22), and the remainder of the outer edge (21c) aside from the connected part (21d) is separated from the frame body (22). The substrate (20) has a projecting part (24) that projects in the thickness direction from a region, of the second surface (21b), that includes at least a portion of the remainder of the outer edge (21c).
Inventors:
SUZUKI TATSUYA (JP)
FUJIMORI YOSHIKAZU (JP)
SHIMOJI NORIYUKI (JP)
FUJIMORI YOSHIKAZU (JP)
SHIMOJI NORIYUKI (JP)
Application Number:
PCT/JP2021/039628
Publication Date:
June 09, 2022
Filing Date:
October 27, 2021
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
B81B3/00; H01L41/053; H01L41/09; H01L41/113; H01L41/187; H04R17/00; H04R17/02
Foreign References:
| JPS5961698U | 1984-04-23 | |||
| JP2019161030A | 2019-09-19 | |||
| JP2001069596A | 2001-03-16 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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