Title:
TRANSFER SYSTEM FOR LCD GLASS SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2000/068118
Kind Code:
A1
Abstract:
A transfer system (100) for transferring LCD glass substrates (L) between processing devices (210, 220, 230), comprising an upper conveyor (110) for transferring LCD glass substrates in feeding direction between the processing devices, a lower conveyor (120) for transferring LCD glass substrates in return direction between the processing devices, and a vertical conveyor for transferring LCD glass substrates in vertical direction between the upper and lower conveyors, wherein the vertical conveyor comprises a plurality of transfer tables (180) which support LCD glass substrates from the underside and move up and down in conjunction with each other, one transfer table forms a part of the upper conveyor, the other transfer table forms a part of the lower conveyor, and the other transfer table forms an escape part of the LCD glass substrate, whereby, even when the LCD glass substrate is increased in size, a transfer can be facilitated, a construction cost can be reduced, and a buffer function can be added to the LCD glass substrate.
Inventors:
HIROKI TSUTOMU (JP)
Application Number:
PCT/JP2000/002887
Publication Date:
November 16, 2000
Filing Date:
May 02, 2000
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
HIROKI TSUTOMU (JP)
HIROKI TSUTOMU (JP)
International Classes:
B65G35/06; B65G37/02; B65G47/51; B65G47/52; B65G49/06; (IPC1-7): B65G47/52
Foreign References:
| JPS5222065Y2 | 1977-05-20 | |||
| JPH05178413A | 1993-07-20 |
Attorney, Agent or Firm:
Kameya, Yoshiaki (Sumiyoshicho Shinjuku-ku, Tokyo, JP)
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