Title:
TRANSPORT VEHICLE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/090542
Kind Code:
A1
Abstract:
A ceiling transport vehicle system, provided with: a travel rail; a ceiling transport vehicle that travels along the travel rail and transports a FOUP, the ceiling transport vehicle having a tank that stores an inert gas, and feeding, during transportation of the FOUP, the inert gas from the tank to the interior of the FOUP; and a gas feeding device provided along the travel rail, the gas feeding device feeding the inert gas to the tank of the ceiling transport vehicle.
Inventors:
MOTOORI YOICHI (JP)
Application Number:
PCT/JP2020/028768
Publication Date:
May 14, 2021
Filing Date:
July 27, 2020
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/677
Foreign References:
| JP2016096192A | 2016-05-26 | |||
| JPS61196856A | 1986-09-01 | |||
| JP2015533026A | 2015-11-16 | |||
| JPH05310323A | 1993-11-22 | |||
| JP2017159975A | 2017-09-14 | |||
| JP2016096192A | 2016-05-26 | |||
| JPS61196856A | 1986-09-01 |
Other References:
See also references of EP 4057325A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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