Title:
TRANSPORTATION DEVICE AND TRANSPORTATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/162340
Kind Code:
A1
Abstract:
This transportation device 100 comprises a coil 107 that includes a core 105 and a winding 106, a drive unit 108 for feeding a current to the winding 106, a current detector 109 for detecting the current value flowing through the winding 106, and a control unit 110 for calculating the position of a holder 102. The control unit 110 calculates the position of the holder 102 on the basis of the current value detected by the current detector 109 and a calibration curve obtained in advance, and changes the calibration curve used according to the manner in which a drive voltage is applied by the drive unit 108. A transportation device and transportation method with which it is possible to obtain unprecedented accuracy of detecting the position of a holder are thereby provided.
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Inventors:
AZUMA SHINJI (JP)
WATANABE HIROSHI (JP)
YANO SHIGERU (JP)
WATANABE HIROSHI (JP)
YANO SHIGERU (JP)
Application Number:
PCT/JP2022/040468
Publication Date:
August 31, 2023
Filing Date:
October 28, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N35/04
Foreign References:
| JP2021196171A | 2021-12-27 | |||
| JP2021058052A | 2021-04-08 | |||
| JP2021010254A | 2021-01-28 | |||
| JP2021196193A | 2021-12-27 |
Attorney, Agent or Firm:
KAICHI IP (JP)
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