Title:
TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2023/140255
Kind Code:
A1
Abstract:
Provided is a treatment method whereby it becomes possible to treat a mixture containing one or both of a halosilane compound and a hydrolysate of a halosilane compound in a safe manner. According to an embodiment, a treatment method for treating a mixture containing one or both of a halosilane compound and a hydrolysate of a halosilane compound is provided. A treating solution having a pH value of 8 to 14 inclusive in a mass corresponding to 100 times the mass of the mixture or more is brought into contact with the mixture.
Inventors:
UCHIDA KENYA (JP)
FUKUI HIROYUKI (JP)
IWAMOTO TAKEAKI (JP)
FUKUI HIROYUKI (JP)
IWAMOTO TAKEAKI (JP)
Application Number:
PCT/JP2023/001202
Publication Date:
July 27, 2023
Filing Date:
January 17, 2023
Export Citation:
Assignee:
TOSHIBA KK (JP)
KIOXIA CORP (JP)
UNIV TOHOKU (JP)
KIOXIA CORP (JP)
UNIV TOHOKU (JP)
International Classes:
C23C16/44; C01B33/107; C23C16/24; H01L21/205
Foreign References:
| JP2020120043A | 2020-08-06 | |||
| JP2020120042A | 2020-08-06 | |||
| JP2020117791A | 2020-08-06 | |||
| JP2019145752A | 2019-08-29 |
Attorney, Agent or Firm:
SUZUYE & SUZUYE (JP)
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