Title:
TRIAXIAL MAGNETIC SENSOR AND MANUFACTURING PROCESS THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/098159
Kind Code:
A1
Abstract:
Disclosed are a triaxial magnetic sensor and a manufacturing process therefor. Said triaxial magnetic sensor comprises a substrate forming at least two grooves, a first magnetic sensor mechanism, a second magnetic sensor mechanism and a third magnetic sensor mechanism; the first magnetic sensor mechanism detects the magnetic field in a first direction; the second magnetic sensor mechanism detects the magnetic field in a second direction; the third magnetic sensor mechanism detects the magnetic field in a third direction; the first magnetic sensor mechanism and the second magnetic sensor mechanism are arranged on the surface of the substrate, and the third magnetic sensor mechanism is arranged within the grooves. At least one pair of adjacent grooves are spaced apart by the at least one first magnetic sensor mechanism and/or the at least one second magnetic sensor mechanism. The present application can reduce processing errors, improve process windows, and improve overall product yields.
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Inventors:
GUO HUIFANG (CN)
XIAO YONG (CN)
XIAO YONG (CN)
Application Number:
PCT/CN2022/114278
Publication Date:
June 08, 2023
Filing Date:
August 23, 2022
Export Citation:
Assignee:
QST CORPORATION LTD (CN)
International Classes:
G01R33/02; G01R33/09
Foreign References:
| CN114220913A | 2022-03-22 | |||
| JP2004006752A | 2004-01-08 | |||
| CN105261699A | 2016-01-20 | |||
| CN104576922A | 2015-04-29 |
Attorney, Agent or Firm:
BEIJING LINKAW PATENT ATTORNEY LAW FIRM (CN)
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